Optical trap assisted nanopatterning for structured surfaces

Romain Fardel, Yu Cheng Tsai, Craig B. Arnold

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate the use of optical trap assisted nanopatterning for creating nanoscale features on surfaces with pre-existing topography. Uniform patterns over silicon and polyimide surfaces with several micrometer deep grooves are demonstrated.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2010
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528896
DOIs
StatePublished - 2010
EventConference on Lasers and Electro-Optics, CLEO 2010 - San Jose, CA, United States
Duration: May 16 2010May 21 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2010
CountryUnited States
CitySan Jose, CA
Period5/16/105/21/10

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Fardel, R., Tsai, Y. C., & Arnold, C. B. (2010). Optical trap assisted nanopatterning for structured surfaces. In Conference on Lasers and Electro-Optics, CLEO 2010 (Optics InfoBase Conference Papers). Optical Society of America (OSA). https://doi.org/10.1364/cleo.2010.cmr2