@inproceedings{6454a4f3680145fd9b2e528f926fbdbc,
title = "Optical properties of Si1-xGex quantum wells and superlattices grown by rapid thermal chemical vapor deposition (Invited Paper)",
abstract = "Through proper reactor design and accurate temperature measurement, high quality silicon/silicon-germanium alloy (Si1-xGex) strained layer structures can be grown by rapid thermal chemical vapor deposition with growth temperatures in the 600 - 700°C range. Photoluminescence measurements show well resolved band-edge features, indicating that the films are of very high quality. Quantum confinement effects have also been observed in quantum wells with widths down to 3 nm.",
author = "Sturm, {James C.} and Xiaodong Xiao and H. Manoharan and Schwartz, {P. V.}",
year = "1992",
language = "English (US)",
isbn = "0819407267",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Publ by Int Soc for Optical Engineering",
pages = "90--98",
editor = "Moslehi, {Mehrdad M.} and Rajendra Singh and Dim-Lee Kwong",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Rapid Thermal and Integrated Processing ; Conference date: 10-09-1991 Through 11-09-1991",
}