Optical analysis of plasma enhanced crystallization of amorphous silicon films

L. Montés, L. Tsybeskov, P. M. Fauchet, K. Pangal, James Christopher Sturm

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Optical analysis of plasma enhanced crystallization of amorphous silicon films'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy