Optical analysis of plasma enhanced crystallization of amorphous silicon films

Engineering & Materials Science

• Photoluminescence 100%
• Amorphous silicon 84%
• Crystallization 67%
• Plasmas 56%
• Raman scattering 29%
• Quantum confinement 18%
• Silicon on insulator technology 15%
• Crystallites 14%
• Photons 12%
• Temperature 8%
• Display devices 7%

Physics & Astronomy

• silicon films 65%
• amorphous silicon 56%
• crystallization 47%
• photoluminescence 43%
• Raman spectra 15%
• crystallites 9%
• grain size 7%
• insulators 7%
• temperature dependence 6%
• characterization 5%
• photons 5%
• silicon 5%
• thin films 5%

Chemical Compounds

• Amorphous Silicon 83%
• Photoluminescence 47%
• Crystallization 43%
• Plasma 38%
• Liquid Film 29%
• Photon 9%
• Grain Size 9%
• Crystallite 8%
• Amorphous Material 7%