Operation of ferroelectric plasma sources in a gas discharge mode

Surface discharge and gas discharge operating modes for ferroelectric plasma sources (FSP) were analyzed. There was a transition from vacuum surface discharge to the gas discharge at pressures of 1-20 Torr. FPS operated in pure gas discharge mode with the formation of almost uniform plasma along the entire surface of the ceramics between strips and the surface discharges were suppressed at pressures between 20 and 80 Torr. In the vacuum surface discharge, the efficiency of FPS was found to be lesser than in the gas discharge mode.