Operation of ferroelectric plasma sources in a gas discharge mode

A. Dunaevsky, N. J. Fisch

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Surface discharge and gas discharge operating modes for ferroelectric plasma sources (FSP) were analyzed. There was a transition from vacuum surface discharge to the gas discharge at pressures of 1-20 Torr. FPS operated in pure gas discharge mode with the formation of almost uniform plasma along the entire surface of the ceramics between strips and the surface discharges were suppressed at pressures between 20 and 80 Torr. In the vacuum surface discharge, the efficiency of FPS was found to be lesser than in the gas discharge mode.

Original languageEnglish (US)
Pages (from-to)2957-2963
Number of pages7
JournalPhysics of Plasmas
Volume11
Issue number5 PART 2
DOIs
StatePublished - May 2004

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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