OBSERVATIONS OF CHANGES IN RESIDUAL GAS AND SURFACE COMPOSITION WITH DISCHARGE CLEANING IN PLT.

  • H. F. Dylla
  • , K. Bol
  • , S. A. Cohen
  • , R. J. Hawryluk
  • , E. B. Meservey
  • , S. M. Rossnagel

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

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Medicine and Dentistry

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Pharmacology, Toxicology and Pharmaceutical Science

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Engineering