Numerical techniques for gas discharge simulation

Research output: Contribution to conferencePaperpeer-review


Summary form only given. A review is made of the types of numerical techniques and associated mathematical models that researchers have recently applied to gas-discharge simulation. Fluid or moment equations, particle simulations, kinetic calculations, and related approaches are included, with an emphasis on approaches that determine the electric field self-consistently via solutions of Poisson's equation. Most discharge simulations have been restricted to one spatial dimension, but discharges in practice, especially radiofrequency discharges, are at least two-dimensional. It is noted that extending self-consistent simulations to two dimensions is an important challenge facing discharge modelers. Opportunities and challenges lie ahead for modeling and simulation of very-low-pressure, magnetically confined plasmas. Other important frontiers include accounting for charged, electrostatically suspended particulates under certain processing conditions, and the numerical simulation issues surrounding discharges with large concentrations of negative ions.

Original languageEnglish (US)
Number of pages1
StatePublished - 1990
Externally publishedYes
Event1990 IEEE International Conference on Plasma Science - Oakland, CA, USA
Duration: May 21 1990May 23 1990


Other1990 IEEE International Conference on Plasma Science
CityOakland, CA, USA

All Science Journal Classification (ASJC) codes

  • General Engineering


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