Novel methods for nanolithography

Christopher Harrison; Miri Park; Paul Chaikin; Richard A. Register; Douglas H. Adamson

Novel methods for nanolithography

Christopher Harrison, Miri Park, Paul Chaikin, Richard A. Register, Douglas H. Adamson

Research output: Contribution to journal › Conference article › peer-review

Abstract

Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.

Original language	English (US)
Pages (from-to)	821-822
Number of pages	2
Journal	American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume	37
Issue number	2
State	Published - Aug 1996
Event	Proceedings of the 1996 ACS Orlando Meeting - Orlando, FL, USA Duration: Aug 25 1996 → Aug 29 1996

All Science Journal Classification (ASJC) codes

Polymers and Plastics

Cite this

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title = "Novel methods for nanolithography",

abstract = "Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.",

author = "Christopher Harrison and Miri Park and Paul Chaikin and Register, {Richard A.} and Adamson, {Douglas H.}",

year = "1996",

month = aug,

language = "English (US)",

volume = "37",

pages = "821--822",

journal = "American Chemical Society, Polymer Preprints, Division of Polymer Chemistry",

issn = "0032-3934",

number = "2",

note = "Proceedings of the 1996 ACS Orlando Meeting ; Conference date: 25-08-1996 Through 29-08-1996",

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TY - JOUR

T1 - Novel methods for nanolithography

AU - Harrison, Christopher

AU - Park, Miri

AU - Chaikin, Paul

AU - Register, Richard A.

AU - Adamson, Douglas H.

PY - 1996/8

Y1 - 1996/8

N2 - Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.

AB - Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.

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UR - http://www.scopus.com/inward/citedby.url?scp=0030204762&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0030204762

SN - 0032-3934

VL - 37

SP - 821

EP - 822

JO - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

JF - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

IS - 2

T2 - Proceedings of the 1996 ACS Orlando Meeting

Y2 - 25 August 1996 through 29 August 1996

ER -

Novel methods for nanolithography

Abstract

All Science Journal Classification (ASJC) codes

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