Novel methods for nanolithography

Christopher Harrison, Miri Park, Paul Chaikin, Richard Alan Register, Douglas H. Adamson

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.

Original languageEnglish (US)
Pages (from-to)821-822
Number of pages2
JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume37
Issue number2
StatePublished - Aug 1 1996

All Science Journal Classification (ASJC) codes

  • Polymers and Plastics

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