TY - JOUR
T1 - Novel methods for nanolithography
AU - Harrison, Christopher
AU - Park, Miri
AU - Chaikin, Paul
AU - Register, Richard Alan
AU - Adamson, Douglas H.
PY - 1996/8/1
Y1 - 1996/8/1
N2 - Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.
AB - Two methods have been developed for nanotechnology: spin coating and water casting. Spin coating technique is an excellent method of producing plastic thin films. The thin films are prepared by spin coating from a toluene solution and the thickness can be varied by adjusting either the spinning speed or the concentration of the solution. Typical solution concentrations are 1-3% with spin speeds between 1 K and 5 K rpm. Water casting method, on the other hand, involves placing drops of 2% diblock solution in toluene on the surface of the deionized water, after which toluene evaporation occurs, leaving plastic thin films on the surface.
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M3 - Article
AN - SCOPUS:0030204762
SN - 0032-3934
VL - 37
SP - 821
EP - 822
JO - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
JF - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
IS - 2
ER -