Nonthermal atmospheric rf plasma in one-dimensional spherical coordinates: Asymmetric sheath structure and the discharge mechanism

Keyphrases

• Ionization Rate 100%
• Spherical Coordinates 100%
• RF Plasma 100%
• Inner Electrode 100%
• Sheath Structure 100%
• Atmospheric Pressure 50%
• Electron Impact Ionization 50%
• Low Power Mode 50%
• Ionization Reaction 50%
• Mode Transition 50%
• High Power Mode 50%
• Local Field Approximation 50%
• Helium 25%
• Oscillation 25%
• Finite Element Method 25%
• Electron Energy 25%
• Electron Density Gradient 25%
• Strong Electric Field 25%
• Surface Processing 25%
• Continuity Equation 25%
• Ohmic 25%
• Electron Heating 25%
• Poisson Equation 25%
• Electron Diffusion 25%
• Excitation Rate 25%
• Electron-impact Excitation 25%
• Nitrogen Addition 25%
• Discharge Power 25%
• One-dimensional Simulation 25%
• Energy Equation 25%
• Ionization Mechanism 25%
• Gasses 25%
• Penning Ionization 25%
• Gap Distance 25%
• Primary Ionization 25%
• Spherical Electrode 25%
• Power-voltage Curve 25%
• Microdischarge 25%
• Metastable Helium 25%
• Field Density 25%

Engineering

• One Dimensional 100%
• Power Mode 100%
• Ionization Rate 100%
• Spherical Coordinate 100%
• Atmospheric Pressure 50%
• Impact Ionization 25%
• Density Gradient 25%
• Strong Electric Field 25%
• Continuity Equation 25%
• Electron Diffusion 25%
• Energy Equation 25%
• Surface Processing 25%
• Powered Electrode 25%
• Electron Energy 25%
• Finite Element Analysis 25%
• Carrier Concentration 25%
• Nitrogen 25%

Physics

• Atmospherics 100%
• Spherical Coordinate 100%
• electrode 100%
• Atmospheric Pressure 16%
• Helium 16%
• Electron Energy 8%
• Electron Density 8%
• Continuity Equation 8%
• Poisson Equation 8%
• Electric Field 8%
• Finite Element Analysis 8%
• Density Gradient 8%
• Nitrogen 8%
• Impact Ionization 8%