Nonlinear model reduction for simulation and control of rapid thermal processing

Henk Aling, Suman Banerjee, Anil K. Bangia, Vernon Cole, Jon Ebert, Abbas Emami-Naeini, Klavs F. Jensen, Ioannis G. Kevrekidis, Stanislav Shvartsman

Research output: Contribution to journalConference articlepeer-review

36 Scopus citations


A methodology (based the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers.

Original languageEnglish (US)
Pages (from-to)2233-2238
Number of pages6
JournalProceedings of the American Control Conference
StatePublished - 1997
EventProceedings of the 1997 American Control Conference. Part 3 (of 6) - Albuquerque, NM, USA
Duration: Jun 4 1997Jun 6 1997

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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