Nonlinear model reduction for simulation and control of rapid thermal processing

Henk Aling; Suman Banerjee; Anil K. Bangia; Vernon Cole; Jon Ebert; Abbas Emami-Naeini; Klavs F. Jensen; Ioannis G. Kevrekidis; Stanislav Shvartsman

Nonlinear model reduction for simulation and control of rapid thermal processing

Henk Aling, Suman Banerjee, Anil K. Bangia, Vernon Cole, Jon Ebert, Abbas Emami-Naeini, Klavs F. Jensen, Ioannis G. Kevrekidis, Stanislav Shvartsman

Chemical & Biological Engineering

Research output: Contribution to journal › Conference article › peer-review

36 Scopus citations

Abstract

A methodology (based the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers.

Original language	English (US)
Pages (from-to)	2233-2238
Number of pages	6
Journal	Proceedings of the American Control Conference
Volume	4
State	Published - 1997
Event	Proceedings of the 1997 American Control Conference. Part 3 (of 6) - Albuquerque, NM, USA Duration: Jun 4 1997 → Jun 6 1997

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

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title = "Nonlinear model reduction for simulation and control of rapid thermal processing",

abstract = "A methodology (based the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers.",

author = "Henk Aling and Suman Banerjee and Bangia, {Anil K.} and Vernon Cole and Jon Ebert and Abbas Emami-Naeini and Jensen, {Klavs F.} and Kevrekidis, {Ioannis G.} and Stanislav Shvartsman",

year = "1997",

language = "English (US)",

volume = "4",

pages = "2233--2238",

journal = "Proceedings of the American Control Conference",

issn = "0743-1619",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1997 American Control Conference. Part 3 (of 6) ; Conference date: 04-06-1997 Through 06-06-1997",

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TY - JOUR

T1 - Nonlinear model reduction for simulation and control of rapid thermal processing

AU - Aling, Henk

AU - Banerjee, Suman

AU - Bangia, Anil K.

AU - Cole, Vernon

AU - Ebert, Jon

AU - Emami-Naeini, Abbas

AU - Jensen, Klavs F.

AU - Kevrekidis, Ioannis G.

AU - Shvartsman, Stanislav

PY - 1997

Y1 - 1997

N2 - A methodology (based the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers.

AB - A methodology (based the Proper Orthogonal Decomposition and Approximate Inertial Manifolds) is proposed for obtaining low order dynamic models of Rapid Thermal Processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers.

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M3 - Conference article

AN - SCOPUS:0030675682

SN - 0743-1619

VL - 4

SP - 2233

EP - 2238

JO - Proceedings of the American Control Conference

JF - Proceedings of the American Control Conference

T2 - Proceedings of the 1997 American Control Conference. Part 3 (of 6)

Y2 - 4 June 1997 through 6 June 1997

ER -

Nonlinear model reduction for simulation and control of rapid thermal processing

Abstract

All Science Journal Classification (ASJC) codes

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