TY - GEN

T1 - Non-thermal atmospheric RF plasma in one-dimensional spherical coordinates

AU - Sakiyama, Y.

AU - Graves, D. B.

PY - 2007

Y1 - 2007

N2 - We present one-dimensional simulations of atmospheric pressure RF-excited plasma with two concentric spherical electrodes and the inner electrode powered. The coupled continuity equations and electron energy equation are solved with Poisson's equation using the finite element method. A mode transition is observed in the discharge power-voltage curve between 1 mW and 1000 mW. In the low power mode, ionization rate peaks only near the inner electrode. In the high power mode, however, the rate of ionization peaks near the outer electrode as well. The ionization rate near the outer electrode is due to ohmic sheath oscillation heating of electrons. Electron heating near the outer electrode may have implications for surfaceprocessing in atmospheric pressure microdischarges.

AB - We present one-dimensional simulations of atmospheric pressure RF-excited plasma with two concentric spherical electrodes and the inner electrode powered. The coupled continuity equations and electron energy equation are solved with Poisson's equation using the finite element method. A mode transition is observed in the discharge power-voltage curve between 1 mW and 1000 mW. In the low power mode, ionization rate peaks only near the inner electrode. In the high power mode, however, the rate of ionization peaks near the outer electrode as well. The ionization rate near the outer electrode is due to ohmic sheath oscillation heating of electrons. Electron heating near the outer electrode may have implications for surfaceprocessing in atmospheric pressure microdischarges.

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U2 - 10.1109/PPPS.2007.4652349

DO - 10.1109/PPPS.2007.4652349

M3 - Conference contribution

AN - SCOPUS:70350680920

SN - 1424409144

SN - 9781424409143

T3 - PPPS-2007 - Pulsed Power Plasma Science 2007

SP - 957

EP - 960

BT - PPPS-2007

T2 - PPPS-2007: Pulsed Power and Plasma Science 2007, The 16th IEEE International Pulsed Power Conference and The 34th IEEE International Conference on Plasma Science

Y2 - 17 June 2007 through 22 June 2007

ER -