TY - GEN
T1 - Non-thermal atmospheric RF plasma in one-dimensional spherical coordinates
AU - Sakiyama, Y.
AU - Graves, D. B.
PY - 2007
Y1 - 2007
N2 - We present one-dimensional simulations of atmospheric pressure RF-excited plasma with two concentric spherical electrodes and the inner electrode powered. The coupled continuity equations and electron energy equation are solved with Poisson's equation using the finite element method. A mode transition is observed in the discharge power-voltage curve between 1 mW and 1000 mW. In the low power mode, ionization rate peaks only near the inner electrode. In the high power mode, however, the rate of ionization peaks near the outer electrode as well. The ionization rate near the outer electrode is due to ohmic sheath oscillation heating of electrons. Electron heating near the outer electrode may have implications for surfaceprocessing in atmospheric pressure microdischarges.
AB - We present one-dimensional simulations of atmospheric pressure RF-excited plasma with two concentric spherical electrodes and the inner electrode powered. The coupled continuity equations and electron energy equation are solved with Poisson's equation using the finite element method. A mode transition is observed in the discharge power-voltage curve between 1 mW and 1000 mW. In the low power mode, ionization rate peaks only near the inner electrode. In the high power mode, however, the rate of ionization peaks near the outer electrode as well. The ionization rate near the outer electrode is due to ohmic sheath oscillation heating of electrons. Electron heating near the outer electrode may have implications for surfaceprocessing in atmospheric pressure microdischarges.
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U2 - 10.1109/PPPS.2007.4652349
DO - 10.1109/PPPS.2007.4652349
M3 - Conference contribution
AN - SCOPUS:70350680920
SN - 1424409144
SN - 9781424409143
T3 - PPPS-2007 - Pulsed Power Plasma Science 2007
SP - 957
EP - 960
BT - PPPS-2007
T2 - PPPS-2007: Pulsed Power and Plasma Science 2007, The 16th IEEE International Pulsed Power Conference and The 34th IEEE International Conference on Plasma Science
Y2 - 17 June 2007 through 22 June 2007
ER -