Nitrogen dissociation in a low pressure cylindrical ICP discharge studied by actinometry and mass spectrometry

Engineering & Materials Science

• Plasma sources 100%
• Inductively coupled plasma 92%
• Mass spectrometry 79%
• Nitrogen 57%
• Gas mixtures 14%
• Argon 13%
• Atoms 12%

Chemical Compounds

• Inductively Coupled Plasma 61%
• Dissociation 44%
• Mass Spectrometry 41%
• Nitrogen 37%
• Pressure 35%
• Nitrogen Atom 10%
• Gas 6%
• Purity 6%
• Mixture 5%

Physics & Astronomy

• mass spectroscopy 60%
• low pressure 51%
• dissociation 50%
• nitrogen 45%
• nitrogen atoms 14%
• gas mixtures 11%
• argon 9%