Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 Å, well separated from molecular nitrogen emission bands, was identified. Jansson’s nonlinear spectral deconvolution method, refined by minimization of [Formula Presented] was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM computer code results, it is proposed that the energetic N’s are generated from [Formula Presented] ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.