Nitrogen atom energy distributions in a hollow-cathode planar sputtering magnetron

Zhehui Wang, Samuel A. Cohen, David N. Ruzic, M. J. Goeckner

Research output: Contribution to journalArticle

17 Scopus citations

Abstract

Energy distributions of nitrogen atoms (N) in a hollow-cathode planar sputtering magnetron were obtained by use of optical emission spectroscopy. A characteristic line, N I 8216.3 Å, well separated from molecular nitrogen emission bands, was identified. Jansson’s nonlinear spectral deconvolution method, refined by minimization of [Formula Presented] was used to obtain the optimal deconvolved spectra. These showed nitrogen atom energies from 1 eV to beyond 500 eV. Based on comparisons with VFTRIM computer code results, it is proposed that the energetic N’s are generated from [Formula Presented] ions after these ions are accelerated through the sheath and dissociatively reflect from the cathode.

Original languageEnglish (US)
Pages (from-to)1904-1911
Number of pages8
JournalPhysical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics
Volume61
Issue number2
DOIs
StatePublished - Jan 1 2000

All Science Journal Classification (ASJC) codes

  • Statistical and Nonlinear Physics
  • Statistics and Probability
  • Condensed Matter Physics

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