New C-F interatomic potential for molecular dynamics simulation of fluorocarbon film formation

Chemical Compounds

• Interatomic Potential 100%
• Fluorocarbon 79%
• Bond Order 78%
• Molecular Dynamics 50%
• Simulation 42%
• Sputtering 36%
• Surface Reaction 35%
• Liquid Film 32%
• Ion 26%
• Carbon Atom 15%
• Reaction Yield 13%
• Molecule 11%

Engineering & Materials Science

• Fluorocarbons 99%
• Molecular dynamics 76%
• Ions 62%
• Surface reactions 48%
• Sputtering 43%
• Computer simulation 37%
• Molecules 33%
• Carbon 25%
• Trajectories 23%

Physics & Astronomy

• fluorocarbons 86%
• molecular dynamics 49%
• simulation 25%
• surface reactions 14%
• ions 12%
• trajectories 10%
• sputtering 10%
• carbon 9%
• molecules 7%