New C-F interatomic potential for molecular dynamics simulation of fluorocarbon film formation

J. Tanaka; C. F. Abrams; D. B. Graves

doi:10.1116/1.582279

New C-F interatomic potential for molecular dynamics simulation of fluorocarbon film formation

J. Tanaka
, C. F. Abrams
, D. B. Graves

Research output: Contribution to journal › Article › peer-review

67 Scopus citations

Abstract

The C-F interatomic potential of fluorocarbon is described by molecular dynamics simulation method. The potential is based in Tersoff's bond order type potential, called the reactive empirical bond-order (REBO) potential. The simulation traces the trajectories of all molecules in a system. The sputtering yields of carbon by Ar ion is calculated to confirm the validity of the REBO-type potential to ion surface reactions.

Original language	English (US)
Pages (from-to)	938-945
Number of pages	8
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	18
Issue number	3
DOIs	https://doi.org/10.1116/1.582279
State	Published - May 2000
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.582279

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title = "New C-F interatomic potential for molecular dynamics simulation of fluorocarbon film formation",

abstract = "The C-F interatomic potential of fluorocarbon is described by molecular dynamics simulation method. The potential is based in Tersoff's bond order type potential, called the reactive empirical bond-order (REBO) potential. The simulation traces the trajectories of all molecules in a system. The sputtering yields of carbon by Ar ion is calculated to confirm the validity of the REBO-type potential to ion surface reactions.",

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AU - Abrams, C. F.

AU - Graves, D. B.

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Y1 - 2000/5

N2 - The C-F interatomic potential of fluorocarbon is described by molecular dynamics simulation method. The potential is based in Tersoff's bond order type potential, called the reactive empirical bond-order (REBO) potential. The simulation traces the trajectories of all molecules in a system. The sputtering yields of carbon by Ar ion is calculated to confirm the validity of the REBO-type potential to ion surface reactions.

AB - The C-F interatomic potential of fluorocarbon is described by molecular dynamics simulation method. The potential is based in Tersoff's bond order type potential, called the reactive empirical bond-order (REBO) potential. The simulation traces the trajectories of all molecules in a system. The sputtering yields of carbon by Ar ion is calculated to confirm the validity of the REBO-type potential to ion surface reactions.

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SN - 0734-2101

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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ER -

New C-F interatomic potential for molecular dynamics simulation of fluorocarbon film formation

Abstract

All Science Journal Classification (ASJC) codes

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