New C-F interatomic potential for molecular dynamics simulation of fluorocarbon film formation

J. Tanaka, C. F. Abrams, D. B. Graves

Research output: Contribution to journalArticlepeer-review

64 Scopus citations

Abstract

The C-F interatomic potential of fluorocarbon is described by molecular dynamics simulation method. The potential is based in Tersoff's bond order type potential, called the reactive empirical bond-order (REBO) potential. The simulation traces the trajectories of all molecules in a system. The sputtering yields of carbon by Ar ion is calculated to confirm the validity of the REBO-type potential to ion surface reactions.

Original languageEnglish (US)
Pages (from-to)938-945
Number of pages8
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Issue number3
DOIs
StatePublished - May 2000
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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