Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device

Eric J. Tonnis; David B. Graves

doi:10.1116/1.1503901

Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device

Eric J. Tonnis
, David B. Graves

Research output: Contribution to journal › Article › peer-review

70 Scopus citations

Abstract

Optical emission thermometry was used to study the neutral temperature within a cylindrical, inductively coupled plasma source for rare gas and molecular plasmas. The neutral temperature was estimated for flowing discharges of argon, helium, neon, nitrogen and oxygen as a function of pressure and power. Results showed that the neutral temperature for all of the discharges increased roughly proportional to the logarithm of the pressure.

Original language	English (US)
Pages (from-to)	1787-1795
Number of pages	9
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	5
DOIs	https://doi.org/10.1116/1.1503901
State	Published - Sep 2002
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1503901

Cite this

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abstract = "Optical emission thermometry was used to study the neutral temperature within a cylindrical, inductively coupled plasma source for rare gas and molecular plasmas. The neutral temperature was estimated for flowing discharges of argon, helium, neon, nitrogen and oxygen as a function of pressure and power. Results showed that the neutral temperature for all of the discharges increased roughly proportional to the logarithm of the pressure.",

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AU - Tonnis, Eric J.

AU - Graves, David B.

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N2 - Optical emission thermometry was used to study the neutral temperature within a cylindrical, inductively coupled plasma source for rare gas and molecular plasmas. The neutral temperature was estimated for flowing discharges of argon, helium, neon, nitrogen and oxygen as a function of pressure and power. Results showed that the neutral temperature for all of the discharges increased roughly proportional to the logarithm of the pressure.

AB - Optical emission thermometry was used to study the neutral temperature within a cylindrical, inductively coupled plasma source for rare gas and molecular plasmas. The neutral temperature was estimated for flowing discharges of argon, helium, neon, nitrogen and oxygen as a function of pressure and power. Results showed that the neutral temperature for all of the discharges increased roughly proportional to the logarithm of the pressure.

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U2 - 10.1116/1.1503901

DO - 10.1116/1.1503901

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AN - SCOPUS:0036749468

SN - 0734-2101

VL - 20

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

ER -

Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device

Abstract

All Science Journal Classification (ASJC) codes

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