Optical emission thermometry was used to study the neutral temperature within a cylindrical, inductively coupled plasma source for rare gas and molecular plasmas. The neutral temperature was estimated for flowing discharges of argon, helium, neon, nitrogen and oxygen as a function of pressure and power. Results showed that the neutral temperature for all of the discharges increased roughly proportional to the logarithm of the pressure.
|Number of pages
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - Sep 2002
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films