Neutral gas temperatures measured within a high-density, inductively coupled plasma abatement device

Eric J. Tonnis, David B. Graves

Research output: Contribution to journalArticlepeer-review

64 Scopus citations

Abstract

Optical emission thermometry was used to study the neutral temperature within a cylindrical, inductively coupled plasma source for rare gas and molecular plasmas. The neutral temperature was estimated for flowing discharges of argon, helium, neon, nitrogen and oxygen as a function of pressure and power. Results showed that the neutral temperature for all of the discharges increased roughly proportional to the logarithm of the pressure.

Original languageEnglish (US)
Pages (from-to)1787-1795
Number of pages9
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number5
DOIs
StatePublished - Sep 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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