Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation

J. J. V́gh; D. Nest; D. B. Graves; R. Bruce; S. Engelmann; T. Kwon; R. J. Phaneuf; G. S. Oehrlein; B. K. Long; C. G. Willson

doi:10.1063/1.2821226

Near-surface modification of polystyrene by Ar₊: Molecular dynamics simulations and experimental validation

J. J. V́gh, D. Nest, D. B. Graves, R. Bruce, S. Engelmann, T. Kwon, R. J. Phaneuf, G. S. Oehrlein, B. K. Long, C. G. Willson

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Abstract

Results are presented from molecular dynamics (MD) simulations of 100 eV Ar+ bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.

Original language	English (US)
Article number	233113
Journal	Applied Physics Letters
Volume	91
Issue number	23
DOIs	https://doi.org/10.1063/1.2821226
State	Published - 2007
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.2821226

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@article{e7d885fc4fae49068abc401e209acfdb,

title = "Near-surface modification of polystyrene by Ar+: Molecular dynamics simulations and experimental validation",

abstract = "Results are presented from molecular dynamics (MD) simulations of 100 eV Ar+ bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.",

author = "{\'V}gh, {J. J.} and D. Nest and Graves, {D. B.} and R. Bruce and S. Engelmann and T. Kwon and Phaneuf, {R. J.} and Oehrlein, {G. S.} and Long, {B. K.} and Willson, {C. G.}",

note = "Funding Information: We gratefully acknowledge financial support of this work from National Science Foundation Nanoscale Interdisciplinary Research Team (NIRT) under Grant No. CTS-0506988.",

year = "2007",

doi = "10.1063/1.2821226",

language = "English (US)",

volume = "91",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "23",

}

TY - JOUR

T1 - Near-surface modification of polystyrene by Ar+

T2 - Molecular dynamics simulations and experimental validation

AU - V́gh, J. J.

AU - Nest, D.

AU - Graves, D. B.

AU - Bruce, R.

AU - Engelmann, S.

AU - Kwon, T.

AU - Phaneuf, R. J.

AU - Oehrlein, G. S.

AU - Long, B. K.

AU - Willson, C. G.

N1 - Funding Information: We gratefully acknowledge financial support of this work from National Science Foundation Nanoscale Interdisciplinary Research Team (NIRT) under Grant No. CTS-0506988.

PY - 2007

Y1 - 2007

N2 - Results are presented from molecular dynamics (MD) simulations of 100 eV Ar+ bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.

AB - Results are presented from molecular dynamics (MD) simulations of 100 eV Ar+ bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.

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DO - 10.1063/1.2821226

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

M1 - 233113

ER -

Near-surface modification of polystyrene by Ar₊: Molecular dynamics simulations and experimental validation

Abstract

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