Nanostencil fabrication with double exposure optical lithography for scalable resist-free patterning of metal on polymers
- Joseph S. Katz
- , Woosung Park
- , Michael T. Barako
- , Aditya Sood
- , Mehdi Asheghi
- , Kenneth E. Goodson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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