@inproceedings{1561c23d9b874a7aa78fc9016f0f8e8a,
title = "Nanostencil fabrication with double exposure optical lithography for scalable resist-free patterning of metal on polymers",
abstract = "Engineers require scalable processes for patterning nanoscale features on sensitive substrates to enable widespread manufacturability of advanced nanoelectronics. Nanostencils have shown promise, but prior work has relied on electron-beam (e-beam) and focused ion beam (FIB) processes. Nanostencils also frequently exhibit significant edge roughness. Here, we present a fabrication process for nanostencils using double exposure optical lithography and a novel capillary-driven lamination technique to reduce edge blurring, demonstrating sub-diffraction limit features of ~200nm on poly(methyl methacrylate) films. We demonstrate the utility of these stencils by generating metal patterns for use with the 3ω thermal conductivity measurement technique. We find a thermal conductivity of 0.24 Wm-1K-1 and an anisotropy ratio of 9.7. This work demonstrates that nanostencils can be used for scalable, resist-free patterning of nanoscale features on sensitive substrates.",
author = "Katz, {Joseph S.} and Woosung Park and Barako, {Michael T.} and Aditya Sood and Mehdi Asheghi and Goodson, {Kenneth E.}",
note = "Funding Information: J.S.K. thanks the Semiconductor Research Corporation (SRC) and the Intel Education Alliance for a Graduate Research Fellowship. This work was supported by the SRC through GRC task 2666. Work was performed in part in the nano@Stanford labs, which are supported by the National Science Foundation as part of the National Nanotechnology Coordinated Infrastructure under award ECCS-1542152. The authors are grateful to the process staff at the SNF and Prof. Yan Xia in the Department of Chemistry at Stanford for helpful discussions. Publisher Copyright: {\textcopyright} 2016 TRF; 2018 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018 ; Conference date: 03-06-2018 Through 07-06-2018",
year = "2018",
doi = "10.31438/trf.hh2018.80",
language = "English (US)",
series = "2018 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018",
publisher = "Transducer Research Foundation",
pages = "280--283",
editor = "Tina Lamers and Mina Rais-Zadeh",
booktitle = "2018 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2018",
}