Nanoscale silicon field effect transistors fabricated using imprint lithoqraphy

Engineering

• Dry Etching 33%
• Electron Optical Lithography 33%
• Field-Effect Transistor 100%
• Lithography 33%
• Mass Production 33%
• Nanoimprint Lithography 66%
• Nanoscale 100%
• Quantum Dot 33%
• Semiconductor Device 33%

Material Science

• Dry Etching 25%
• Field Effect Transistor 100%
• Lithography 100%
• Nanodevice 25%
• Quantum Dot 25%
• Semiconductor Device 25%
• Silicon 100%
• Transistor 25%

Keyphrases

• Nanoscale Transistor 50%