Nanoplasmonics in Embedded CMOS Electronics: Future mm-scale Complex Nano-optical Sensory Systems

Research output: Contribution to journalConference articlepeer-review

Abstract

Here we demonstrate for the first time massively parallelizable nanoplasmonic structures exploiting the subwavelength lithography of embedded copper-based interconnect layers in an industry standard CMOS process with 65-nm feature size. We show this in the context of a fully integrated, fluorescence based CMOS bio-molecular sensor array with integrated angle and scattering insensitive nanoplasmonic filters. The nano-optics and the all the readout analog and digital electronics are all co-designed and co-integrated in a single 2 mm2 CMOS chip with absolutely ‘no change’ approach to the CMOS foundry processes.

Original languageEnglish (US)
Pages (from-to)266
Number of pages1
JournalInternational Conference on Metamaterials, Photonic Crystals and Plasmonics
StatePublished - 2019
Event10th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2019 - Lisbon, Portugal
Duration: Jul 23 2019Jul 26 2019

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Materials Science (miscellaneous)
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

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