Nanoplasmonics in Embedded CMOS Electronics: Future mm-scale Complex Nano-optical Sensory Systems

Here we demonstrate for the first time massively parallelizable nanoplasmonic structures exploiting the subwavelength lithography of embedded copper-based interconnect layers in an industry standard CMOS process with 65-nm feature size. We show this in the context of a fully integrated, fluorescence based CMOS bio-molecular sensor array with integrated angle and scattering insensitive nanoplasmonic filters. The nano-optics and the all the readout analog and digital electronics are all co-designed and co-integrated in a single 2 mm2 CMOS chip with absolutely ‘no change’ approach to the CMOS foundry processes.