@inproceedings{dc80c4f4af664109ba77a81a1e5de614,
title = "Nanoimprint (technology, tools, applications and commercialization) and new technologies beyond",
author = "Chou, {Stephen Y.}",
year = "2007",
month = dec,
day = "1",
doi = "10.1109/IMNC.2007.4456076",
language = "English (US)",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}