Nanoimprint mold fabrication and replication by room-temperature conformal chemical vapor deposition

Patrick F. Murphy, Keith J. Morton, Zengli Fu, Stephen Y. Chou

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Fingerprint

Dive into the research topics of 'Nanoimprint mold fabrication and replication by room-temperature conformal chemical vapor deposition'. Together they form a unique fingerprint.

Physics & Astronomy