Nanoimprint lithography and lithographically induced self-assembly

Research output: Contribution to journalArticlepeer-review

98 Scopus citations
Original languageEnglish (US)
Pages (from-to)512-517
Number of pages6
JournalMRS Bulletin
Volume26
Issue number7
DOIs
StatePublished - Jul 2001

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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