Nanoimprint lithography - A key "engine" to nanotechnology research and commercialization today

S. Y. Chou

doi:10.1109/IMNC.2002.1178515

Nanoimprint lithography - A key "engine" to nanotechnology research and commercialization today

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Nanoimprint lithography (NIL) has increasingly been recognized as a key nanomanufacturing technology that will play a critical role in commercialization of nanostructures. In this talk, we will overview the development of NIL technologies (machines, masks, resists, and processes) and applications in the NanoStructure Laboratory at Princeton University.

Original language	English (US)
Title of host publication	2002 International Microprocesses and Nanotechnology Conference, MNC 2002
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	4
Number of pages	1
ISBN (Electronic)	4891140313, 9784891140311
DOIs	https://doi.org/10.1109/IMNC.2002.1178515
State	Published - 2002
Event	International Microprocesses and Nanotechnology Conference, MNC 2002 - Tokyo, Japan Duration: Nov 6 2002 → Nov 8 2002

Publication series

Name	2002 International Microprocesses and Nanotechnology Conference, MNC 2002

Other

Other	International Microprocesses and Nanotechnology Conference, MNC 2002
Country/Territory	Japan
City	Tokyo
Period	11/6/02 → 11/8/02

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2002.1178515

Cite this

Chou, S. Y. (2002). Nanoimprint lithography - A key "engine" to nanotechnology research and commercialization today. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002 (pp. 4). Article 1178515 (2002 International Microprocesses and Nanotechnology Conference, MNC 2002). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2002.1178515

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title = "Nanoimprint lithography - A key {"}engine{"} to nanotechnology research and commercialization today",

abstract = "Nanoimprint lithography (NIL) has increasingly been recognized as a key nanomanufacturing technology that will play a critical role in commercialization of nanostructures. In this talk, we will overview the development of NIL technologies (machines, masks, resists, and processes) and applications in the NanoStructure Laboratory at Princeton University.",

author = "Chou, {S. Y.}",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; International Microprocesses and Nanotechnology Conference, MNC 2002 ; Conference date: 06-11-2002 Through 08-11-2002",

year = "2002",

doi = "10.1109/IMNC.2002.1178515",

language = "English (US)",

series = "2002 International Microprocesses and Nanotechnology Conference, MNC 2002",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Chou, SY 2002, Nanoimprint lithography - A key "engine" to nanotechnology research and commercialization today. in 2002 International Microprocesses and Nanotechnology Conference, MNC 2002., 1178515, 2002 International Microprocesses and Nanotechnology Conference, MNC 2002, Institute of Electrical and Electronics Engineers Inc., pp. 4, International Microprocesses and Nanotechnology Conference, MNC 2002, Tokyo, Japan, 11/6/02. https://doi.org/10.1109/IMNC.2002.1178515

Nanoimprint lithography - A key "engine" to nanotechnology research and commercialization today. / Chou, S. Y.
2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. p. 4 1178515 (2002 International Microprocesses and Nanotechnology Conference, MNC 2002).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Y2 - 6 November 2002 through 8 November 2002

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Nanoimprint lithography - A key "engine" to nanotechnology research and commercialization today

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