@inproceedings{915e5d0a3baa411d95b95bcae01922c1,
title = "Nanoimprint lithography - A key {"}engine{"} to nanotechnology research and commercialization today",
abstract = "Nanoimprint lithography (NIL) has increasingly been recognized as a key nanomanufacturing technology that will play a critical role in commercialization of nanostructures. In this talk, we will overview the development of NIL technologies (machines, masks, resists, and processes) and applications in the NanoStructure Laboratory at Princeton University.",
author = "Chou, {Stephen Y.}",
year = "2002",
month = jan,
day = "1",
doi = "10.1109/IMNC.2002.1178515",
language = "English (US)",
series = "2002 International Microprocesses and Nanotechnology Conference, MNC 2002",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2002 International Microprocesses and Nanotechnology Conference, MNC 2002",
address = "United States",
note = "International Microprocesses and Nanotechnology Conference, MNC 2002 ; Conference date: 06-11-2002 Through 08-11-2002",
}