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Nanoimprint lithography
Stephen Y. Chou
Electrical and Computer Engineering
Princeton Institute for the Science and Technology of Materials
Research output
:
Chapter in Book/Report/Conference proceeding
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Chapter
7
Scopus citations
Overview
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Engineering & Materials Science
Industry
14%
Integrated circuits
29%
Magnetic disk storage
55%
Nanoimprint lithography
100%
Semiconductor materials
57%
Throughput
22%
Chemical Compounds
Industry
47%
Semiconductor
49%