Nanocrystalline silicon thin film transistors on optically clear polymer foil substrates

Alex Kattamis, I. Chun Cheng, Ke Long, James C. Sturm, Sigurd Wagner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have fabricated TFTs of nanocrystalline silicon (nc-Si) at 150°C on clear polymer substrates (coefficients of thermal expansion, α∼45 to 55ppm/K), on Kapton® 200E (α=17ppm/K), and on Corning 1737 glass (α=3ppm/K) for comparison. Because thermally stable polymers, such as Kapton® 200E polyimide, have glass transition temperatures as high as 325°C, they are candidates for direct substitution of display glass. The stresses developed in the substrate and device layers, due to a, are reduced by decreasing the thickness of the active layers, by cutting the layers into islands separated by exposed substrate, and by designing stresses, via plasma conditions, into the SiNx passivating layers. By using these three techniques we have made nc-Si TFTs on high Tg, and high a, clear polymer foils with electron mobilities of up to 18cm2/Vs. When integrated with bottom-emitting organic light emitting diodes, such devices will allow for a 10x reduction in pixel TFT areas, compared to TFTs of amorphous silicon.

Original languageEnglish (US)
Title of host publicationGiant-Area Electronics on Nonconventional Substrates
PublisherMaterials Research Society
Pages55-60
Number of pages6
ISBN (Print)1558998241, 9781558998247
DOIs
StatePublished - 2005
Event2005 MRS Spring Meeting - San Franciso, CA, United States
Duration: Mar 28 2005Apr 1 2005

Publication series

NameMaterials Research Society Symposium Proceedings
Volume870
ISSN (Print)0272-9172

Other

Other2005 MRS Spring Meeting
CountryUnited States
CitySan Franciso, CA
Period3/28/054/1/05

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Kattamis, A., Cheng, I. C., Long, K., Sturm, J. C., & Wagner, S. (2005). Nanocrystalline silicon thin film transistors on optically clear polymer foil substrates. In Giant-Area Electronics on Nonconventional Substrates (pp. 55-60). (Materials Research Society Symposium Proceedings; Vol. 870). Materials Research Society. https://doi.org/10.1557/proc-870-h2.7