Nano-optical systems in CMOS

Lingyu Hong, Xuyang Lu, Kaushik Sengupta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


Optical systems-on-chip (SOCs) with integrated optical passives in the visible and near-IR range can have a tremendous impact in miniaturizing complex optical instrumentation to enable a new class of ultra-compact, low-cost optical sensors and imagers for a wide variety of emerging applications. However, while high-density image sensors are now commonplace in CMOS, all passive optical components are typically realized externally, and are often bulky and expensive which limits its space for potential applications. In this paper, we present a design methodology where sub-wavelength lithographic features in modern day CMOS processes, particularly in the copper-based interconnect layers, can be exploited to realize massively complex and multi-functional nano-optical components. Co-designed with embedded detection and electronic circuitry, this integrated approach can potentially open the door to a new class of optical SOCs. In this paper, we illustrate this approach with three design examples: the first fully integrated fluorescence-based CMOS bio-molecular sensor with integrated nanoplasmonic filters, the first optical spectrometer in CMOS in visible and near-IR, and the first optical CMOS physically unclonable function (PUF) exploiting process-sensitive photonic crystals, all in 65-nm CMOS.

Original languageEnglish (US)
Title of host publication2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781509063895
StatePublished - Sep 27 2017
Event60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017 - Boston, United States
Duration: Aug 6 2017Aug 9 2017

Publication series

NameMidwest Symposium on Circuits and Systems
ISSN (Print)1548-3746


Other60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017
Country/TerritoryUnited States

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


  • Biosensor
  • CMOS
  • Copper
  • Imager
  • Interconnects
  • Metal-optics
  • Nano-optics
  • Nanoplasmonics
  • Plasmonics
  • Sensor


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