@inproceedings{92f6c50208a34c438b67b7ef5810e2cc,
title = "Nano-optical systems in CMOS",
abstract = "Optical systems-on-chip (SOCs) with integrated optical passives in the visible and near-IR range can have a tremendous impact in miniaturizing complex optical instrumentation to enable a new class of ultra-compact, low-cost optical sensors and imagers for a wide variety of emerging applications. However, while high-density image sensors are now commonplace in CMOS, all passive optical components are typically realized externally, and are often bulky and expensive which limits its space for potential applications. In this paper, we present a design methodology where sub-wavelength lithographic features in modern day CMOS processes, particularly in the copper-based interconnect layers, can be exploited to realize massively complex and multi-functional nano-optical components. Co-designed with embedded detection and electronic circuitry, this integrated approach can potentially open the door to a new class of optical SOCs. In this paper, we illustrate this approach with three design examples: the first fully integrated fluorescence-based CMOS bio-molecular sensor with integrated nanoplasmonic filters, the first optical spectrometer in CMOS in visible and near-IR, and the first optical CMOS physically unclonable function (PUF) exploiting process-sensitive photonic crystals, all in 65-nm CMOS.",
keywords = "Biosensor, CMOS, Copper, Imager, Interconnects, Metal-optics, Nano-optics, Nanoplasmonics, Plasmonics, Sensor",
author = "Lingyu Hong and Xuyang Lu and Kaushik Sengupta",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017 ; Conference date: 06-08-2017 Through 09-08-2017",
year = "2017",
month = sep,
day = "27",
doi = "10.1109/MWSCAS.2017.8053071",
language = "English (US)",
series = "Midwest Symposium on Circuits and Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "906--909",
booktitle = "2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017",
address = "United States",
}