Nano-graphoepitaxy of semiconductors for 3D integration

F. Crnogorac, D. J. Witte, Q. Xia, B. Rajendran, D. S. Pickard, Z. Liu, A. Mehta, S. Sharma, A. Yasseri, T. I. Kamins, S. Y. Chou, R. F.W. Pease

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