Fingerprint
Dive into the research topics of 'Multilayer resist methods for nanoimprint lithography on nonflat surfaces'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Multilayer resist methods for nanoimprint lithography on nonflat surfaces
Xiaoyun Sun, Lei Zhuang, Wei Zhang, Stephen Y. Chou
Research output: Contribution to journal › Article › peer-review
77
Scopus
citations