Multilayer resist methods for nanoimprint lithography on nonflat surfaces

Xiaoyun Sun, Lei Zhuang, Wei Zhang, Stephen Y. Chou

Research output: Contribution to journalArticlepeer-review

76 Scopus citations

Fingerprint Dive into the research topics of 'Multilayer resist methods for nanoimprint lithography on nonflat surfaces'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy