@inbook{2309ca92ddad422c9e4cdbf2cf93fe2c,
title = "Molecular dynamics simulations of ion-surface interactions with applications to plasma processing",
author = "Graves, {David B.} and Abrams, {Cameron F.}",
note = "Funding Information: The authors relied heavily on the work of Maria Barone and Bryan Helmer, and their many insights and contributions are gratefully acknowledged. Junichi Tanaka and Koji Satake contributed many insights as well, and we are grateful to them. The authors acknowledge support from the University of California SMART, Lam Research Corporation, National Science Foundation, and Semiconductor Research Corporation.",
year = "2001",
doi = "10.1016/s0065-2377(01)28006-5",
language = "English (US)",
isbn = "0120085283",
series = "Advances in Chemical Engineering",
publisher = "Academic Press Inc.",
pages = "149--201",
booktitle = "Advances in Chemical Engineering",
address = "United States",
}