Molecular dynamics simulations of direct reactive ion etching: surface roughening of silicon by chlorine

Keyphrases

• Molecular Dynamics Simulation 100%
• Reactive Ion Etching 100%
• Chlorine 100%
• Surface Roughening 100%
• 3D Image 50%
• Silicon Surface 50%
• Near-surface Region 50%
• Plasma Etching 50%

Engineering

• Computer Simulation 100%
• Silicon Surface 50%
• Surface Region 50%
• Dimensional Image 50%

Material Science

• Surface Etching 50%