Molecular dynamics simulations of direct reactive ion etching: surface roughening of silicon by chlorine

M. E. Barone, T. O. Robinson, D. B. Graves

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Molecular dynamics simulations of direct reactive ion etching: surface roughening of silicon by chlorine'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science