Modification of a force field for molecular dynamics simulations of silicon etching by chlorine atoms

Engineering & Materials Science

• Chlorine 100%
• Molecular dynamics 91%
• Etching 87%
• Atoms 84%
• Silicon 64%
• Computer simulation 44%
• Molecules 19%
• Hot Temperature 9%

Physics & Astronomy

• chlorine 86%
• field theory (physics) 83%
• etching 61%
• molecular dynamics 59%
• silicon 43%
• atoms 41%
• simulation 31%
• predictions 21%
• molecules 10%
• interactions 8%

Chemical Compounds

• Chlorine Atom 86%
• Etching 73%
• Molecular Dynamics 60%
• Force 55%
• Simulation 51%
• Modification 45%
• Chlorine 35%
• Molecule 7%