Modification of a force field for molecular dynamics simulations of silicon etching by chlorine atoms

Joseph R. Vella, David B. Graves

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Fingerprint

Dive into the research topics of 'Modification of a force field for molecular dynamics simulations of silicon etching by chlorine atoms'. Together they form a unique fingerprint.

Keyphrases

Material Science