Modelling of thermal stresses and distortions in X-ray masks employing the embedded absorber structure

Nadim I. Maluf, Steven Y. Chou, R. Fabian, W. Pease

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Modelling of thermal stresses and distortions in X-ray masks employing the embedded absorber structure'. Together they form a unique fingerprint.

Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds