A model of a plasma process requires treatment of both the discharge physics and chemistry. Present plasma models are fairly crude by the standards of other fields in which reacting flows are modelled. In this paper, a modelling strategy based on the fluid equations for discharge physics and standard balance equations for neutral species will be presented. Recent results from a fluid model of a 13. 56 MHz discharge in a chemically inert plasma illustrate the approach.
|Original language||English (US)|
|Number of pages||22|
|Journal||Proceedings - The Electrochemical Society|
|State||Published - 1987|
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