Modeling of high density plasma sources

David B. Graves, Han Ming Wu, Robert K. Porteous

Research output: Contribution to journalConference articlepeer-review


A two-dimensional, axisymmetric model of a bounded, partially ionized, magnetized glow discharge plasma is presented. The model treats positive ions as particles and electrons as a fluid in a hybrid configuration. The results reported here are directed towards simulating an electron cyclotron resonance (ECR), microwave-sustained plasma. Results include predictions of plasma density and potential, electron temperature and ion flux and energy. Models such as the one presented here have the potential to be used by plasma process engineers and plasma tool designers.

Original languageEnglish (US)
Pages (from-to)160-171
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Apr 16 1993
Externally publishedYes
EventAdvanced Techniques for Integrated Circuit Processing II 1992 - San Jose, United States
Duration: Sep 20 1992Sep 25 1992

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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