Modeling of gas phase and surface reactions in an aluminum nitride growth system

Keyphrases

• Gas-phase Reactions 100%
• Growing System 100%
• Epitaxy 100%
• Halide Vapor Transport 100%
• Gas-surface Reaction 100%
• Nitride Growth 100%
• Species Transport 50%
• Crystal Growth 50%
• Numerical Model 50%
• Deposition Rate 50%
• Carrier Gas Flow Rate 50%
• Surface Chemistry 50%
• Nitrides 50%
• Vapor Phase 50%
• Deposition Uniformity 50%
• Gasses 50%
• Furnace Temperature 50%
• Three-zone 50%
• Reactor Wall 50%
• Conjugate Heat Transfer 50%
• Wall Deposition 50%
• Multi-component Fluid Flows 50%

Material Science

• Surface Reaction 100%
• Epitaxy 100%
• Aluminum Nitride 100%
• Halide 100%
• Fluid Flow 50%
• Gas Flow 50%
• Crystal Growth 50%