Modeling of gas phase and surface reactions in an aluminum nitride growth system

  • D. Cai
  • , L. L. Zheng
  • , H. Zhang
  • , V. L. Tassev
  • , D. F. Bliss

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Fingerprint

Dive into the research topics of 'Modeling of gas phase and surface reactions in an aluminum nitride growth system'. Together they form a unique fingerprint.

Keyphrases

Chemical Engineering

Engineering