Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Keyphrases

• Argon 100%
• Electron Energy Distribution Function 100%
• Inductively Coupled Plasma 100%
• Electron Impact 66%
• Electron Temperature 33%
• Electron Density 33%
• Gas Phase 33%
• High Pressure 33%
• Low Pressure 33%
• Power-law Model 33%
• Diffusive Transport 33%
• Nonlocality 33%
• Neutral Gas Temperature 33%
• Impact Rate 33%
• Impact Surface 33%
• Surface Quenching 33%
• Heating Gas 33%
• Metastable Density 33%
• Rate Coefficient 33%
• Impact Reaction 33%

Physics

• Electron Energy 100%
• Energy Distribution 100%
• Distribution Function 100%
• Electron Density 25%
• Vapor Phase 25%
• Neutral Gas 25%
• Gas Temperature 25%
• Transportation 25%