@inproceedings{b5abf8364eef4f92899b591124966fb1,
title = "Modeling and simulation of plasma processes",
abstract = "Some of the basic problems in modeling gas discharges between parallel plate electrodes are outlined. These problems are then illustrated with results from simulations of helium discharges in one spatial dimension.",
keywords = "Discharges, Electrodes, Electrons, Helium, Plasma applications, Plasma chemistry, Plasma materials processing, Plasma simulation, Sputter etching, Surface cleaning",
author = "Graves, {D. B.} and M. Surendra",
note = "Publisher Copyright: {\textcopyright} 1991 IEEE.; International Electron Devices Meeting, IEDM 1991 ; Conference date: 08-12-1991 Through 11-12-1991",
year = "1991",
doi = "10.1109/IEDM.1991.235283",
language = "English (US)",
series = "Technical Digest - International Electron Devices Meeting, IEDM",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "887--890",
booktitle = "International Electron Devices Meeting 1991, IEDM 1991",
address = "United States",
}