Abstract
We present a model of an ECR plasma in a cylindrical (z, r) geometry with resonant zone near the substrate surface. The model combines a hybrid (particle ion-fluid electron) treatment of plasma transport with an ad-hoc model of microwave power deposition. The model is used to test the effect of the radial profile of microwave power on the spatial profiles of plasma parameters: plasma density, plasma potential and electron temperature. It is shown that for uniformity of ion flux at the substrate surface, microwave power must be peaked off axis.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2999-3006 |
| Number of pages | 8 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 32 |
| Issue number | 6 S |
| DOIs | |
| State | Published - Jun 1993 |
| Externally published | Yes |
All Science Journal Classification (ASJC) codes
- General Engineering
- General Physics and Astronomy
Keywords
- Electron cyclotron resonance
- High density plasma sources
- Plasma simulation
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