We present a model of an ECR plasma in a cylindrical (z, r) geometry with resonant zone near the substrate surface. The model combines a hybrid (particle ion-fluid electron) treatment of plasma transport with an ad-hoc model of microwave power deposition. The model is used to test the effect of the radial profile of microwave power on the spatial profiles of plasma parameters: plasma density, plasma potential and electron temperature. It is shown that for uniformity of ion flux at the substrate surface, microwave power must be peaked off axis.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
- Electron cyclotron resonance
- High density plasma sources
- Plasma simulation