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Microstructural studies of Co silicide layers formed on SiGe and SiGeC
S. Jin, H. Bender, R. A. Donaton, K. Maex, A. Vantomme, G. Langouche, A. St Amour, J. C. Sturm
Research output: Contribution to journal › Conference article › peer-review
1
Scopus
citations