Microstructural studies of Co silicide layers formed on SiGe and SiGeC

  • S. Jin
  • , H. Bender
  • , R. A. Donaton
  • , K. Maex
  • , A. Vantomme
  • , G. Langouche
  • , A. St Amour
  • , J. C. Sturm

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

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Material Science