Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Max Shtein, Peter Peumans, Jay Burton Benziger, Stephen R. Forrest

Research output: Contribution to journalArticle

71 Scopus citations

Abstract

The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

Original languageEnglish (US)
Pages (from-to)4005-4016
Number of pages12
JournalJournal of Applied Physics
Volume93
Issue number7
DOIs
StatePublished - Apr 1 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

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