Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Max Shtein; Peter Peumans; Jay B. Benziger; Stephen R. Forrest

doi:10.1063/1.1557783

Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Max Shtein, Peter Peumans, Jay B. Benziger, Stephen R. Forrest

Research output: Contribution to journal › Article › peer-review

78 Scopus citations

Abstract

The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

Original language	English (US)
Pages (from-to)	4005-4016
Number of pages	12
Journal	Journal of Applied Physics
Volume	93
Issue number	7
DOIs	https://doi.org/10.1063/1.1557783
State	Published - Apr 1 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.1557783

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@article{bc4ea5c76e4944f0bbbb815b037d7b5b,

title = "Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition",

abstract = "The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.",

author = "Max Shtein and Peter Peumans and Benziger, {Jay B.} and Forrest, {Stephen R.}",

year = "2003",

month = apr,

day = "1",

doi = "10.1063/1.1557783",

language = "English (US)",

volume = "93",

pages = "4005--4016",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "7",

}

TY - JOUR

T1 - Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

AU - Shtein, Max

AU - Peumans, Peter

AU - Benziger, Jay B.

AU - Forrest, Stephen R.

PY - 2003/4/1

Y1 - 2003/4/1

N2 - The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

AB - The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

UR - http://www.scopus.com/inward/record.url?scp=0037391016&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037391016&partnerID=8YFLogxK

U2 - 10.1063/1.1557783

DO - 10.1063/1.1557783

M3 - Article

AN - SCOPUS:0037391016

SN - 0021-8979

VL - 93

SP - 4005

EP - 4016

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -

Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Abstract

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