Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Max Shtein; Peter Peumans; Jay B. Benziger; Stephen R. Forrest

doi:10.1063/1.1557783

Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Max Shtein, Peter Peumans, Jay B. Benziger, Stephen R. Forrest

Research output: Contribution to journal › Article › peer-review

76 Scopus citations

Abstract

The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

Original language	English (US)
Pages (from-to)	4005-4016
Number of pages	12
Journal	Journal of Applied Physics
Volume	93
Issue number	7
DOIs	https://doi.org/10.1063/1.1557783
State	Published - Apr 1 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.1557783

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title = "Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition",

abstract = "The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.",

author = "Max Shtein and Peter Peumans and Benziger, {Jay B.} and Forrest, {Stephen R.}",

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AU - Shtein, Max

AU - Peumans, Peter

AU - Benziger, Jay B.

AU - Forrest, Stephen R.

PY - 2003/4/1

Y1 - 2003/4/1

N2 - The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

AB - The micron scale patterned growth of small molecular weight organic semiconductor thin films was presented. The micropatterning was done by the use of organic vapor phase deposition (OVPD). The simulation and deposition experiments showed that the deposited feature shape was controlled by the mean free path, the aperture geometry and the mask-to-substrate separation.

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JO - Journal of Applied Physics

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Micropatterning of small molecular weight organic semiconductor thin films using organic vapor phase deposition

Abstract

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