TY - JOUR
T1 - Micropatterned lead zirconium titanate thin films
AU - Vartuli, J. S.
AU - Özenbaş, M.
AU - Chun, C. M.
AU - Trau, M.
AU - Aksay, Ilhan A.
N1 - Funding Information:
We gratefully acknowledge the technical assistance of D.M. Dabbs and E.P. Luther. G.M. Whitesides and his group at Harvard University generously provided the patterned silicon wafers used in this work. This work was supported by an Army Research Office/Multidisciplinary University Research Initiative Program (Grant No. DAAH04-95-1-0102) and National Science Foundation (Grant No. INT98-10336). We also acknowledge partial support for MÖ from TÜBİTAK (Turkey), and from the NASA University Research Engineering and Technology Institute on Bio Inspired Materials (BIMat) under (Award No. NCC-1-02037).
PY - 2003/5
Y1 - 2003/5
N2 - Micropatterning of Pb(Zr0.52Ti0.48)O3 (PZT) thin films with line features as small as 350 nm was demonstrated through capillary molding of organometallic solutions within the continuous channels of an elastomeric mold. Despite the large stresses that develop during the evaporation of the solvent, pyrolysis of the organics, and the densification and crystallization of the inorganic gel, the patterned crystalline PZT films were crack-free and mechanically robust. Flawless regions as large as 1 cm2 were obtained. The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single perovskite PZT grains that formed during annealing at 600-700 °C completely filled the cross-sectional area of the patterned lines. Lead acetate, zirconium propoxide, and titanium isopropoxide were used as the starting materials. Substrates used included silver tape, stainless steel plate, silicon wafer, and platinum-coated silicon wafer.
AB - Micropatterning of Pb(Zr0.52Ti0.48)O3 (PZT) thin films with line features as small as 350 nm was demonstrated through capillary molding of organometallic solutions within the continuous channels of an elastomeric mold. Despite the large stresses that develop during the evaporation of the solvent, pyrolysis of the organics, and the densification and crystallization of the inorganic gel, the patterned crystalline PZT films were crack-free and mechanically robust. Flawless regions as large as 1 cm2 were obtained. The cross-sectional shape of the patterned PZT lines was trapezoidlike. Single perovskite PZT grains that formed during annealing at 600-700 °C completely filled the cross-sectional area of the patterned lines. Lead acetate, zirconium propoxide, and titanium isopropoxide were used as the starting materials. Substrates used included silver tape, stainless steel plate, silicon wafer, and platinum-coated silicon wafer.
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U2 - 10.1557/JMR.2003.0173
DO - 10.1557/JMR.2003.0173
M3 - Article
AN - SCOPUS:0038109821
SN - 0884-2914
VL - 18
SP - 1259
EP - 1265
JO - Journal of Materials Research
JF - Journal of Materials Research
IS - 5
ER -