Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters

J. A. Bonetti; A. D. Turner; M. Kenyon; A. Orlando; J. A. Brevik; A. Trangsmd; R. Sudiwala; H. G. LeDuc; H. T. Nguyen; P. K. Day; J. J. Bock; S. R. Golwala; J. Sayers; J. M. Kovac; A. E. Lange; W. C. Jones; C. L. Kuo

doi:10.1063/1.3292354

Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters

J. A. Bonetti
, A. D. Turner
, M. Kenyon
, A. Orlando
, J. A. Brevik
, A. Trangsmd
, R. Sudiwala
, H. G. LeDuc
, H. T. Nguyen
, P. K. Day
, J. J. Bock
, S. R. Golwala
, J. Sayers
, J. M. Kovac
, A. E. Lange
, W. C. Jones
, C. L. Kuo

Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES's). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane-isolated, polarization-sensitive, antenna-coupled TES's. After processing, selected wafers are pre-screened in a quick-turn-around, cryogen-free, ³He fridge. The pre-screening is performed with a commercial resistance bridge and measures transition temperatures (T _c) and normal state resistances (R _n). After pre-screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of T _c, R _n, thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.

Original language	English (US)
Title of host publication	Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop
Pages	367-370
Number of pages	4
DOIs	https://doi.org/10.1063/1.3292354
State	Published - 2009
Event	13th International Workshop on Low Temperature Detectors, LTD-13 - Stanford, CA, United States Duration: Jul 20 2009 → Jul 24 2009

Publication series

Name	AIP Conference Proceedings
Volume	1185
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	13th International Workshop on Low Temperature Detectors, LTD-13
Country/Territory	United States
City	Stanford, CA
Period	7/20/09 → 7/24/09

All Science Journal Classification (ASJC) codes

Ecology, Evolution, Behavior and Systematics
Ecology
Plant Science
General Physics and Astronomy
Nature and Landscape Conservation

Keywords

CMB
Cosmic microwave background
Cosmology
Polariza
TES bolometers

Access to Document

10.1063/1.3292354

Cite this

Bonetti, J. A., Turner, A. D., Kenyon, M., Orlando, A., Brevik, J. A., Trangsmd, A., Sudiwala, R., LeDuc, H. G., Nguyen, H. T., Day, P. K., Bock, J. J., Golwala, S. R., Sayers, J., Kovac, J. M., Lange, A. E., Jones, W. C., & Kuo, C. L. (2009). Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters. In Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop (pp. 367-370). (AIP Conference Proceedings; Vol. 1185). https://doi.org/10.1063/1.3292354

@inproceedings{925b8fa55d644de58dcbf7b160173bc2,

title = "Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters",

abstract = "Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES's). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane-isolated, polarization-sensitive, antenna-coupled TES's. After processing, selected wafers are pre-screened in a quick-turn-around, cryogen-free, 3He fridge. The pre-screening is performed with a commercial resistance bridge and measures transition temperatures (T c) and normal state resistances (R n). After pre-screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of T c, R n, thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.",

keywords = "CMB, Cosmic microwave background, Cosmology, Polariza, TES bolometers",

author = "Bonetti, \{J. A.\} and Turner, \{A. D.\} and M. Kenyon and A. Orlando and Brevik, \{J. A.\} and A. Trangsmd and R. Sudiwala and LeDuc, \{H. G.\} and Nguyen, \{H. T.\} and Day, \{P. K.\} and Bock, \{J. J.\} and Golwala, \{S. R.\} and J. Sayers and Kovac, \{J. M.\} and Lange, \{A. E.\} and Jones, \{W. C.\} and Kuo, \{C. L.\}",

year = "2009",

doi = "10.1063/1.3292354",

language = "English (US)",

isbn = "9780735407510",

series = "AIP Conference Proceedings",

pages = "367--370",

booktitle = "Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop",

note = "13th International Workshop on Low Temperature Detectors, LTD-13 ; Conference date: 20-07-2009 Through 24-07-2009",

}

Bonetti, JA, Turner, AD, Kenyon, M, Orlando, A, Brevik, JA, Trangsmd, A, Sudiwala, R, LeDuc, HG, Nguyen, HT, Day, PK, Bock, JJ, Golwala, SR, Sayers, J, Kovac, JM, Lange, AE, Jones, WC & Kuo, CL 2009, Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters. in Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop. AIP Conference Proceedings, vol. 1185, pp. 367-370, 13th International Workshop on Low Temperature Detectors, LTD-13, Stanford, CA, United States, 7/20/09. https://doi.org/10.1063/1.3292354

Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters. / Bonetti, J. A.; Turner, A. D.; Kenyon, M. et al.
Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop. 2009. p. 367-370 (AIP Conference Proceedings; Vol. 1185).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters

AU - Bonetti, J. A.

AU - Turner, A. D.

AU - Kenyon, M.

AU - Orlando, A.

AU - Brevik, J. A.

AU - Trangsmd, A.

AU - Sudiwala, R.

AU - LeDuc, H. G.

AU - Nguyen, H. T.

AU - Day, P. K.

AU - Bock, J. J.

AU - Golwala, S. R.

AU - Sayers, J.

AU - Kovac, J. M.

AU - Lange, A. E.

AU - Jones, W. C.

AU - Kuo, C. L.

PY - 2009

Y1 - 2009

N2 - Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES's). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane-isolated, polarization-sensitive, antenna-coupled TES's. After processing, selected wafers are pre-screened in a quick-turn-around, cryogen-free, 3He fridge. The pre-screening is performed with a commercial resistance bridge and measures transition temperatures (T c) and normal state resistances (R n). After pre-screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of T c, R n, thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.

AB - Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES's). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane-isolated, polarization-sensitive, antenna-coupled TES's. After processing, selected wafers are pre-screened in a quick-turn-around, cryogen-free, 3He fridge. The pre-screening is performed with a commercial resistance bridge and measures transition temperatures (T c) and normal state resistances (R n). After pre-screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of T c, R n, thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.

KW - CMB

KW - Cosmic microwave background

KW - Cosmology

KW - Polariza

KW - TES bolometers

UR - https://www.scopus.com/pages/publications/74349125740

UR - https://www.scopus.com/pages/publications/74349125740#tab=citedBy

U2 - 10.1063/1.3292354

DO - 10.1063/1.3292354

M3 - Conference contribution

AN - SCOPUS:74349125740

SN - 9780735407510

T3 - AIP Conference Proceedings

SP - 367

EP - 370

BT - Low Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop

T2 - 13th International Workshop on Low Temperature Detectors, LTD-13

Y2 - 20 July 2009 through 24 July 2009

ER -

Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters

Abstract

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All Science Journal Classification (ASJC) codes

Keywords

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