Microfabrication and device parameter testing of the focal plane arrays for the spider and BICEP2/Keck CMB Polarimeters

J. A. Bonetti, A. D. Turner, M. Kenyon, A. Orlando, J. A. Brevik, A. Trangsmd, R. Sudiwala, H. G. LeDuc, H. T. Nguyen, P. K. Day, J. J. Bock, S. R. Golwala, J. Sayers, J. M. Kovac, A. E. Lange, W. C. Jones, C. L. Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES's). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane-isolated, polarization-sensitive, antenna-coupled TES's. After processing, selected wafers are pre-screened in a quick-turn-around, cryogen-free, 3He fridge. The pre-screening is performed with a commercial resistance bridge and measures transition temperatures (T c) and normal state resistances (R n). After pre-screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of T c, R n, thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.

Original languageEnglish (US)
Title of host publicationLow Temperature Detectors LTD-13 - Proceedings of the 13th International Workshop
Number of pages4
StatePublished - 2009
Event13th International Workshop on Low Temperature Detectors, LTD-13 - Stanford, CA, United States
Duration: Jul 20 2009Jul 24 2009

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Other13th International Workshop on Low Temperature Detectors, LTD-13
Country/TerritoryUnited States
CityStanford, CA

All Science Journal Classification (ASJC) codes

  • Ecology, Evolution, Behavior and Systematics
  • Ecology
  • Plant Science
  • General Physics and Astronomy
  • Nature and Landscape Conservation


  • CMB
  • Cosmic microwave background
  • Cosmology
  • Polariza
  • TES bolometers


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