Spider and BICEP2/Keck are projects to study the polarization of the cosmic microwave background (CMB). The focal planes for both require large format arrays of superconducting transition edge sensors (TES's). A major challenge for these projects is fabricating arrays with high uniformity in device parameters. A microfabrication process is described that meets this challenge. The results from device testing are discussed. Each focal plane is composed of 4 square wafers (tiles), and each wafer contains 128 membrane-isolated, polarization-sensitive, antenna-coupled TES's. After processing, selected wafers are pre-screened in a quick-turn-around, cryogen-free, 3He fridge. The pre-screening is performed with a commercial resistance bridge and measures transition temperatures (T c) and normal state resistances (R n). After pre-screening, 4 tiles at a time are fully characterized in a testbed employing a SQUID readout and SQUID mulitplexing. The tests demonstrate the values of T c, R n, thermal conductance, g, and the standard deviations of each, across a wafer and from wafer to wafer, are within design specifications.