MEMS temperature characterization by CdSe quantum dots

Sha Li; Kai Zhang; Jui Ming Yang; Liwei Lin; Haw Yang

doi:10.1109/SENSOR.2007.4300397

MEMS temperature characterization by CdSe quantum dots

Sha Li, Kai Zhang, Jui Ming Yang, Liwei Lin, Haw Yang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1-mm long, 40-μm wide aluminum micro heater. Quantum dot emission wavelength shifts as a function of temperature was for the first time characterized at the single particle level to be 0.24 nm/°C in the 25-65 °C range. Temperature profiles of a MEMS heater under different input powers were evaluated based on the spectral shift of bulk quantum dots on the heater and were compared with a one-dimensional electrothermal model. Both experiments and simulations are consistent with variations of less than 0.8 °C. The theoretical spatial resolution of this technique can go down to the size of a single quantum dot for non-contact temperature characterizations of micro/nano structures including biological samples.

Original language	English (US)
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1369-1372
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300397
State	Published - 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: Jun 10 2007 → Jun 14 2007

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	6/10/07 → 6/14/07

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

Keywords

CdSe quantum dots
MEMS heater
Temperature characterization

Access to Document

10.1109/SENSOR.2007.4300397

Cite this

Li, S., Zhang, K., Yang, J. M., Lin, L., & Yang, H. (2007). MEMS temperature characterization by CdSe quantum dots. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1369-1372). Article 4300397 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300397

@inproceedings{eec55610a70b42dd9d5fa0e141f07c09,

title = "MEMS temperature characterization by CdSe quantum dots",

abstract = "Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1-mm long, 40-μm wide aluminum micro heater. Quantum dot emission wavelength shifts as a function of temperature was for the first time characterized at the single particle level to be 0.24 nm/°C in the 25-65 °C range. Temperature profiles of a MEMS heater under different input powers were evaluated based on the spectral shift of bulk quantum dots on the heater and were compared with a one-dimensional electrothermal model. Both experiments and simulations are consistent with variations of less than 0.8 °C. The theoretical spatial resolution of this technique can go down to the size of a single quantum dot for non-contact temperature characterizations of micro/nano structures including biological samples.",

keywords = "CdSe quantum dots, MEMS heater, Temperature characterization",

author = "Sha Li and Kai Zhang and Yang, {Jui Ming} and Liwei Lin and Haw Yang",

year = "2007",

doi = "10.1109/SENSOR.2007.4300397",

language = "English (US)",

isbn = "1424408423",

series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "1369--1372",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

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Li, S, Zhang, K, Yang, JM, Lin, L & Yang, H 2007, MEMS temperature characterization by CdSe quantum dots. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300397, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1369-1372, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 6/10/07. https://doi.org/10.1109/SENSOR.2007.4300397

MEMS temperature characterization by CdSe quantum dots. / Li, Sha; Zhang, Kai; Yang, Jui Ming et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1369-1372 4300397 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Lin, Liwei

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N2 - Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1-mm long, 40-μm wide aluminum micro heater. Quantum dot emission wavelength shifts as a function of temperature was for the first time characterized at the single particle level to be 0.24 nm/°C in the 25-65 °C range. Temperature profiles of a MEMS heater under different input powers were evaluated based on the spectral shift of bulk quantum dots on the heater and were compared with a one-dimensional electrothermal model. Both experiments and simulations are consistent with variations of less than 0.8 °C. The theoretical spatial resolution of this technique can go down to the size of a single quantum dot for non-contact temperature characterizations of micro/nano structures including biological samples.

AB - Non-contact temperature measurements of MEMS structures using CdSe quantum dots (QDs) have been successfully demonstrated for a 1-mm long, 40-μm wide aluminum micro heater. Quantum dot emission wavelength shifts as a function of temperature was for the first time characterized at the single particle level to be 0.24 nm/°C in the 25-65 °C range. Temperature profiles of a MEMS heater under different input powers were evaluated based on the spectral shift of bulk quantum dots on the heater and were compared with a one-dimensional electrothermal model. Both experiments and simulations are consistent with variations of less than 0.8 °C. The theoretical spatial resolution of this technique can go down to the size of a single quantum dot for non-contact temperature characterizations of micro/nano structures including biological samples.

KW - CdSe quantum dots

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Li S, Zhang K, Yang JM, Lin L, Yang H. MEMS temperature characterization by CdSe quantum dots. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 1369-1372. 4300397. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300397

MEMS temperature characterization by CdSe quantum dots

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